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Microfluidic Devices and Systems III: 18-19 September 2000 Santa Clara, USA (Proceedings of Spie)
Microfluidic Devices and Systems II: 20-21 September 1999 Santa Clara, California (Proceedings of Spie, Volume 3877)
Miniaturized Systems With Micro-Optics and Mems: 20-22 September 1999 Santa Clara, California (Proceedings of Spie, Volume 3878)
Materials and Device Characterization in Micromachining II: 20-21 September 1999 Santa Clara, California (Proceedings of Spie, Volume 3875)
Micromachine Technology for Diffraction and Holographic Optics: 20-21 September 1999 Santa Clara, California (Proceedings of Spie, Volume 3879)
Micromachining and Microfabrication Process Technology V: 20-22 September 1999 Santa Clara, California (Proceedings of Spie, Volume 3874)
Mems Reliability for Critical and Space Applications: 21-22 September 1999 Santa Clara, California (Proceedings of Spie, Volume 3880)
Micromachined Devices and Components V: 20-21 September 1999 Santa Clara, California (Proceedings of Spie, Volume 3876)
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