978-0-9616721-5-7 / 0961672153

Silicon Processing for the VLSI Era, Vol. 3: The Submicron MOSFET

by Wolf, Stanley

Publisher:Lattice Press



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About the book:

Volume 3: The Submicron MOSFET. Treats the topics of submicron MOSFET device physics and the relationship between such device physics and submicron MOSFET fabrication. DLC: Integrated circuits - Very large scale.

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