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Shin'ichiro Kimura
(Kimura, Shin'ichiro)
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Challenges in Process Integration and Device Technology (Proceedings of Spie)
by David Burnett, Shin'ichiro Kimura
, Bhanwar Singh
ISBN 9780819438423 (978-0-8194-3842-3)
Softcover, Society of Photo Optical, 2000
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